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硅微机械加工光波导压力传感器的设计
消耗积分:3 |
格式:rar |
大小:129 |
2009-06-24
王毅山
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随着波导材料的研究和进展,采用新的波导材料设计出了一种波导式压力传感器,就光波导压力传感器的原理和特性作了一个简要阐述,对它的工艺流程作了详细的描述。
关键词:光波导压力传感器; 硅微机械法; 结构; 原理; 特性
Abstract :With the development and research of wave guide material ,the new wave guide materials were adopted to design a new optical wave guide pressure sensor. The structure ,character and principle of the optical wave guide pressure sensor were expounded here. The fabrication process was discussed.
Key words :optical wave guide pressure sensor ; silicon micro machined ; structure ; principle ; character
关键词:光波导压力传感器; 硅微机械法; 结构; 原理; 特性
Abstract :With the development and research of wave guide material ,the new wave guide materials were adopted to design a new optical wave guide pressure sensor. The structure ,character and principle of the optical wave guide pressure sensor were expounded here. The fabrication process was discussed.
Key words :optical wave guide pressure sensor ; silicon micro machined ; structure ; principle ; character
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