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High-Resolution Tip Positionin
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大小:378 |
2010-08-13
vinww特烦恼
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Introduction
The Agilent 5600LS AFM system
features a fully addressable, 200 mm
x 200 mm stage to support samples of
various sizes. After loading a sample as
large as an 8-inch wafer on the stage,
any locations (including the wafer edge)
can be reached directly by the AFM
tip without remounting or rotating the
sample. In addition, the 5600LS offers
the ability to move the stage with sub-
micrometer-scale precision over the
system’s entire hundreds-of-millimeters
translation range, thus enabling high-
resolution tip positioning at selected
sample locations. This application note
provides an explanation, illustration,
and how-to guide of high-resolution tip
positioning and its role in facilitating
in situ AFM imaging.
The Agilent 5600LS AFM system
features a fully addressable, 200 mm
x 200 mm stage to support samples of
various sizes. After loading a sample as
large as an 8-inch wafer on the stage,
any locations (including the wafer edge)
can be reached directly by the AFM
tip without remounting or rotating the
sample. In addition, the 5600LS offers
the ability to move the stage with sub-
micrometer-scale precision over the
system’s entire hundreds-of-millimeters
translation range, thus enabling high-
resolution tip positioning at selected
sample locations. This application note
provides an explanation, illustration,
and how-to guide of high-resolution tip
positioning and its role in facilitating
in situ AFM imaging.
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