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基于全息光栅的CCD位移传感器
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2009-06-22
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提出了一种新型的基于全息光栅的CCD 位移传感器,该系统利用CCD 分辨力高、像素均匀等特点,对干涉条纹的移动进行精确定位,而且全息光栅在测量过程中又具有不受光源波长的影响、适用光谱范围宽等特点,实现了位移的自动精确测量。该系统具有一定的实用价值及应用前景。
关键词:线阵CCD ; 全息光栅; 位移传感器
Abstract :A kind of new CCD displacement sensor based on holographic grating is made. This system carry out accurate location to interfering stripe moving using high resolution capacity and resembles plain in color character2 istic of CCD ,moreover ,holographic grating have do not receive the wavelength of light source influence in mea2 suring course , suitable spectrum scope wide etc. characteristic ,the auto2accurate measure of displacement is real2 ized. This system has certain practical value and application prospect .
Key words :linear CCD ; holographic grating ; displacement sensor
关键词:线阵CCD ; 全息光栅; 位移传感器
Abstract :A kind of new CCD displacement sensor based on holographic grating is made. This system carry out accurate location to interfering stripe moving using high resolution capacity and resembles plain in color character2 istic of CCD ,moreover ,holographic grating have do not receive the wavelength of light source influence in mea2 suring course , suitable spectrum scope wide etc. characteristic ,the auto2accurate measure of displacement is real2 ized. This system has certain practical value and application prospect .
Key words :linear CCD ; holographic grating ; displacement sensor
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