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Chapter 7N Agilent10735A, 107
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Description
The Agilent10735A and Agilent10736A Three-Axis interferometers
(seefigures7N-1 and 7N-2, respectively) provide three parallel
interferometers in a single housing. They allow up to three
measurements (displacement, pitch, yaw) to be made on a single axis.
The Agilent10735A and Agilent10736A interferometers are identical
except for their measurement beam patterns.
The Agilent10736A-001 interferometer (see Figure7N-3) is identical
to the Agilent10736A interferometer, except that its Measurement
Axis #2 beam paths are bent at right angles away from its other
measurement axis paths.
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