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一种高分辨力角位移传感器量程扩展方法
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2009-07-14
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提出一种采用多探测光路的角位移量程扩展方案, 可以在不降低分辨力的条件下, 将量程扩展多倍, 使传感器同时具有高分辨力、大量程的优点。结果表明, 量程扩展到360" , 两光路的分辨力分别为0. 004"和0. 005"。
关键词: 角位移传感器; 临界反射; 量程扩展
Abstract:A scheme fo r extending measurement range of the angular disp lacement senso r is p resented. The measurement range of the senso r can be extended w ithout reducing measurement reso lut ion by us2 ing mult i2receiving op t ical units, and the senso rmeet some p ract ical app licat ionsw ith h igh measurement reso lut ion and large measurement range. The results show that itsmeasurement range is 360" and reso2 lut ion are 0. 004" and 0. 005" respect ively.
Key words:A ngle senso r; Crit ical reflect ion; M easurement range
关键词: 角位移传感器; 临界反射; 量程扩展
Abstract:A scheme fo r extending measurement range of the angular disp lacement senso r is p resented. The measurement range of the senso r can be extended w ithout reducing measurement reso lut ion by us2 ing mult i2receiving op t ical units, and the senso rmeet some p ract ical app licat ionsw ith h igh measurement reso lut ion and large measurement range. The results show that itsmeasurement range is 360" and reso2 lut ion are 0. 004" and 0. 005" respect ively.
Key words:A ngle senso r; Crit ical reflect ion; M easurement range
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