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压阻式压力传感器零点输出研究
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大小:251 |
2009-07-10
维生素B2
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使用有限元方法,分析了压力传感器力敏电阻条工作时的自身发热对传感器零点输出的影响,结果表明:由于电阻工作时的发热引起传感器温度分布的不均匀,即便组成压力传感器电桥的力敏电阻条参数完全匹配,传感器也可能存在零点输出。
关键词: 压力传感器;压阻效应;零点输出;硅
Abstract : Using FEM (finite element method) ,the influence of the heat generated by the working piezoresistor of a pressure sen2 sor to the zero point output of the sensor is analyzed ,and the result shows :because of the uneven temperature distribution caused by
the heat of piezoresistor’s work ,there is a offset of the output of the bridge even though the electronic parameters of the bridge’s resisters are fully matched to each other.
Key words : pressure sensor ;piezoresistivity ;zero point output ;silicon
关键词: 压力传感器;压阻效应;零点输出;硅
Abstract : Using FEM (finite element method) ,the influence of the heat generated by the working piezoresistor of a pressure sen2 sor to the zero point output of the sensor is analyzed ,and the result shows :because of the uneven temperature distribution caused by
the heat of piezoresistor’s work ,there is a offset of the output of the bridge even though the electronic parameters of the bridge’s resisters are fully matched to each other.
Key words : pressure sensor ;piezoresistivity ;zero point output ;silicon
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