The evolution of IC design is driven by a continuous demand for increased performance. This push translates into more functionality and increasing complexity. Design closure is getting more difficult to achieve at each subsequent node because of new process effects and variability that impact design functionality and performance. More accurate extraction and simulation is required to help designers converge on an optimal design that has a high certainty of achieving yield at the target specifications, without costly and time-consuming over-design. Time-to-market pressures dictate that a solution to this problem must fit into existing design flows for a wide range of design applications and not increase the cycle time. Traditional parasitic extraction tools are unable to meet the parasitic accuracy criteria at 28 nm and below. IC designers at these nodes need to extract parasitics with field solver accuracy to evaluate the effects of parasitics on circuit timing and functionality, without compromising performance. Rule-based extractors are fast, but they are not designed to extend to evertightening accuracy requirements. Traditional field solvers are not designed to deliver the needed performance. These limitations force designers to build in extra design margins, which eliminates the benefits of moving to a smaller node in the first place. Enter Calibre® xACT 3D—a new product designed to provide the reference-level accuracy of a 3D field solver coupled with fast performance and high scalability. Calibre xACT 3D leverages its integration into the established best-in-class production design sign-off flow with Calibre LVS and its device and interconnect modeling infrastructure for maximum usability. This paper details how the Calibre xACT 3D extraction solution addresses the extraction challenges for design signoff at advanced nodes.