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微机电系统的发展与应用
张虎豹
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微机电系统（MEMS）是当前一个发展极为迅速并涉及多个学科的领域。本文主要介绍了微机电系统的产生与发展过程，讨论了它所采用的材料和加工技术、该技术涉及的各个学科，着重阐述了器件的具体分类、结构组成、各类器件的具体特点及其在工程技术中的实际应用，并指出其发展趋势及对诸多领域的深远影响。
关键词 MEMS 传感器 执行器 纳米技术 工艺
Abstract ： MEMS is a fast developing field related to many
disciplines at present times. The origin and development
procedure of MEMS is mainly introduced in this paper, adopted
material, processing technology and related disciplines are
discussed, the classification,structure and features of device and
its practical application in engineering and technology are also
expounded in detail,and its developing tendency and profound
influence on many disciplines are also pointed out.
Key Words： MEMS Transducer Execute unit Nano
technology Technics
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