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用于半导体气体传感器的程控标定系统
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2009-06-30
王刚
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组建了一套用于半导体气体传感器的程控标定系统。该系统使用一台四路输出的程控直流电源对半导体气体传感器进行编程加热,计算机控制质量流量计实现低体积分数被测气体的精确配气并实时采集传感器的响应信号。该系统可对由四支气体传感器构成的阵列进行多种工作模式的标定。
关键词: 半导体气体传感器; 标定; 程控系统; 质量流量控制器; 通用接口总线
Abstract : A programmable calibration system for semiconductor gas sensors is constructed , in which a pro2 grammable DC power supply with four output channels is used to heat up gas sensors. A computer is used to con2 trol MFCs to accurately offer testing gases in low concentrations ,and to collect the responses of gas sensors in real time. The system can calibrate a sensor array consisted of four sensors operated in different model at the same
time.
Key words : semiconductor gas sensor ; calibration ; programmable system; mass flow controller (MFC ) ; gener2 al purpose interface bus( GPIB)
关键词: 半导体气体传感器; 标定; 程控系统; 质量流量控制器; 通用接口总线
Abstract : A programmable calibration system for semiconductor gas sensors is constructed , in which a pro2 grammable DC power supply with four output channels is used to heat up gas sensors. A computer is used to con2 trol MFCs to accurately offer testing gases in low concentrations ,and to collect the responses of gas sensors in real time. The system can calibrate a sensor array consisted of four sensors operated in different model at the same
time.
Key words : semiconductor gas sensor ; calibration ; programmable system; mass flow controller (MFC ) ; gener2 al purpose interface bus( GPIB)
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