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空间微机电系统的研究与进展
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大小:331 |
2009-07-15
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介绍了微机电系统的基本原理及其在空间应用的发展概况, 着重介绍了空间微传感器、微执行器、RF2M EM S、MO EM S、微仪器和微ö纳卫星的研究与进展情况。
关键词: 微机电系统; 微卫星; 空间应用
Abstract: The basal p rincip les and space app lict ions ofM icroM echanical System s are int roduced. The detailed status in the research and development of m icro senso rs, m icro actuato rs, RF2M EM S, MO SEM S, m icro devices and m icroönano satellites are p resented.
Key words: M icro Elect roM echanical System s; m icro sats; space app licat ion
关键词: 微机电系统; 微卫星; 空间应用
Abstract: The basal p rincip les and space app lict ions ofM icroM echanical System s are int roduced. The detailed status in the research and development of m icro senso rs, m icro actuato rs, RF2M EM S, MO SEM S, m icro devices and m icroönano satellites are p resented.
Key words: M icro Elect roM echanical System s; m icro sats; space app licat ion
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