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二维FDTD法互连线分析的非均匀网格实现
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用二维时域有限差分法计算高速集成电路有耗互连线频变参数时，如采用均匀细网格划分整个仿真空间，微米级的互连线结构和趋肤深度会导致计算机内存空间占用太大，计算速度很低。基于此，该文提出一种结合理想电壁截断边界条件的渐变非均匀网格划分技术，其优点是简单方便，编程计算极易实现，并且可以在保证计算精度的前提下明显提高电磁仿真的效率。
关 键 词 二维时域有限差分法; 互连线; 渐变非均匀网格; 趋肤深度
Abstract The traditional FDTD discretization of Maxwell equations in which all cells are equal is proved not to be efficient in many cases. In order to conform to fine scale geometric details of interconnects without increasing the overall mesh size and without losing computational accuracy, graded mesh technique combined with perfectly electric conducting boundary in 2D FDTD algorithm is proposed in this paper. Numerical experiments verify its accuracy and efficiency.
Key words 2D finite-difference time-domain algorithm; interconnects; graded mesh;
skin depth
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