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InGaAs/InP APD探测器光电特性检测
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建立了雪崩二极管的静态光电特性的自动测试系统。利用该系统对光敏面的直径为500 μm的台面型InGaAs/InP雪崩光电二极管(APDs)进行测试。测试结果表明，该APD器件在90%击穿电压下的暗电流为151 nA，在直径500 μm的光敏面上其光响应均匀性良好。提出一种测量雪崩二极管倍增因子的方法，只需利用普通的测量电流-电压的测试仪器，就可以获得开始倍增时的光电流，从而得到APD的倍增因子。通过该方法得到的InGaAs/InP APD器件最大倍增因子的典型值在10～100量级。
关 键 词 静态光电特性的自动测试系统; 雪崩光电二极管; 大面积APD; 倍增因子
Abstract A measurement system is set up which could measure static optoelectronic characteristics of avalanche photodiodes (APDs). By using this system, the mesa-structure InP/InGaAs APDs is measured. The results show that the APDs have a relatively low dark current (～150 nA at 90% of breakdown) and a uniform photoresponse profile of about 500 μm diameter. A method of getting APDs’s multiplication gain is also proposed. Through getting the photocurrent at the point where multiplication is beginning, the multiplication gain can be obtained by the simple current-voltage equipment. For InP/InGaAs APDs, the typical maximum multiplication gain measured by this method is about 10～100.
Key words auto-measurement system of static optoelectronic characteristics; avalanche photodiodes; large area APD; multiplication gain
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