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微机电系统MEMS
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2009-11-16
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MicroElectroMechanical Systems, MEMS, are systems based on a range of techologies whereby tiny mechanical elements, both sensors and actuators, can be implemented.It turns out that these elements have excellent system properties.The elements are often interfaced to microelectronical driving or sensing components (ICs) by appropriate packaging or on the same silicon wafer. The semiconductor silicon is not only good for making electronics but its material properties are extremely good.
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