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基于激光莫尔信号精密定位装置的高速高精度定位控制

消耗积分:3 | 格式:rar | 大小:165 | 2009-05-27

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介绍了激光干涉莫尔信号差动式精密定位方法,提出了精密定位装置的粗控和微控两段式控制方式,扩大了装置的定位控制范围,又有效地缩短精密定位时间,实现装置宽控制范围的高速高精度控制。 
关键词:激光莫尔信号,精密定位控制,定位时间,定位精度
 
Control over high alignment accuracy and high speed of a precision alignment system based on laser moire signals ZHOU Lizhong1, Xie Yong1, Furuhashi Hideo2, Uchida Yoshiyukl2 (1.Information Engineering School, Yangzhou Univ. ,Yangzhou 225009,China;2.Information Network Engineering Department of Aichi Instiute of Technology.Japan) Abstract:This article introdnces principle of the differential precision positioning using laser Moire signals and discusses the macro-control type and micro-control type of a precision alignment system. The principle expands the control range and effectizely shortens precision alignment time for precision alignment. It com fulfil control over high alignment accuracy and high speed of a precision alignment system. 
Key Words:Laser moire signals,Control over precisioni positioning,Alignment time, Alignment accuracy

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