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硅基光波导压力传感器
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2009-07-09
刘润生
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硅基光波导压力传感器由于具有灵敏度高、耐高温、抗电磁场干扰能力强、微型等优点,特别适合于在特殊环境中的应用。简要介绍了全反射光波导和抗共振反射光波导压力传感器的结构特点、工作原理及其研究现状。
关键词: 压力传感器; 硅; 光波导; 抗共振反射
Abstract : Si2based optical waveguide pressure sensors can be applied in special environment because of their high sensitivity , ability to withstand high temperature ,immunity to electromagnetic interference and miniaturization. The structures ,characteristics , operating principles and researches about Si2based total reflecting optical waveg2 uide and antiresonant reflecting optical waveguide pressure sensors are briefly introduced.
Key words : pressure sensors ; silicon ; optical waveguide ; antiresonant reflecting
关键词: 压力传感器; 硅; 光波导; 抗共振反射
Abstract : Si2based optical waveguide pressure sensors can be applied in special environment because of their high sensitivity , ability to withstand high temperature ,immunity to electromagnetic interference and miniaturization. The structures ,characteristics , operating principles and researches about Si2based total reflecting optical waveg2 uide and antiresonant reflecting optical waveguide pressure sensors are briefly introduced.
Key words : pressure sensors ; silicon ; optical waveguide ; antiresonant reflecting
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