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微机电系统(MEMS)控制驱动讨论

消耗积分:0 | 格式:pdf | 大小:383 KB | 2012-10-08

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Abstract: The number of uses for microelectromechanical systems (MEMS) is growing—they allow us todo jobs once considered impossible. This tutorial explains the applications for MEMS and the increasingneed to provide precision control and drivers for these devices. Design and manufacturing considerationsare also discussed.

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